Measuring standard

Coefficient of linear expansion

Two-coordinate TITANID phase grating on glass; grating period 8 µm

?therm 8 x 10–6 K–1

Accuracy grade

±2 µm

Measuring range

68 mm x 68 mm,

other measuring ranges upon request

Reference marks1)

One reference mark in each axis, 3 mm after beginning of measuring length

Interface

1 VPP

Signal period

4 µm

Cutoff frequency –3 dB

? 300 kHz

Traversing speed

? 72 m/min

Interpolation error

Position noise RMS

±12 nm3)

2 nm (450 kHz2))

Electrical connection

0.5 m cable with 15-pin D-sub connector (male); interface electronics in connector

Cable length

See interface description, but ? 30 m (with HEIDENHAIN cable)

Power supply

DC 5 V ±0.25 V

Current consumption

< 185 mA per axis

Vibration 55 Hz to 2000 Hz

Shock 11 ms

? 80 m/s2 (EN 60068-2-6)

? 100 m/s2 (EN 60068-2-27)

Operating temperature

0 °C to 50 °C

Mass Scanning head

Grid plate

Connecting cable

Connector

170 g (without cable)

75 g

37 g/m

140 g

1) The reference mark signal deviates in its zero crossovers from the interface specification (see Mounting Instructions)

2) –3 dB cutoff frequency of the subsequent electronics

3) With HEIDENHAIN interface electronics, e.g. EIB 741